| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular beam source capable of generating a phosphorus molecular beam with impurities reduced, a method of using a molecular beam source, and molecular beam crystal growth equipment using a molecular beam source. SOLUTION: A molecular beam source 6 comprises a red phosphorus storing means 2, a trapping means 7, and a separating means 3. If a phosphorus material stored in the red phosphorus storing means 2 is heated so as to be vaporized, since H<SB>2</SB>O and H<SB>3</SB>PO<SB>4</SB>having a vapor pressure higher than the phosphorus are vaporized prior to the phosphorus, they are removed by discharging the gas generated in the initial stage after the start of the heating operation. The phosphorus material is moved to the trapping means 7. Since the temperature inside the trapping means 7 is lower than the fusing temperature of P<SB>2</SB>O<SB>5</SB>and higher than the solidifying temperature of yellow phosphorus, phosphorus oxide such as P<SB>2</SB>O<SB>5</SB>, having a vapor pressure lower than phosphorus is deposited on the inner wall of the trapping means 7 at the time the phosphorus material in the vapor liquid equilibrium state passes through the trapping means 7 so as to be removed from the phosphorus material. Thereafter, P<SB>4</SB>molecules are separated into P<SB>2</SB>molecules by the separating means 3 so as to generate a phosphorus molecular beam. COPYRIGHT: (C)2008,JPO&INPIT
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