| 摘要 |
PROBLEM TO BE SOLVED: To prevent inspection accuracy from deteriorating due to the misdetection that light that has been reflected irregularly is detected as a bright spot defect. SOLUTION: An inspection apparatus 30, which is used for inspecting a liquid crystal panel 11, is equipped with a transfer conveyor 31 for transferring the liquid crystal panel 11; an inspecting backlight 32 for irradiating the backside of the liquid crystal panel 11 with light; an area sensor 33 for imaging the liquid crystal panel 11; and a determining section 34, which is connected to the area sensor 33 and processes the receiving signal that is output from the area sensor 33. In the determining section 34 determines the existence of defects in panel images P1-P3 obtained by imaging are detected, its position is detected and the defect position information is stored, being associated with the panel images P1-P3 which have detected the defect. Then, the determining section 34 applies an AND operation to the defect position information of a plurality of panel images P1-P3 and obtains the difference of the result of this AND operation and the defect position information of respective panel images P1-P3. COPYRIGHT: (C)2008,JPO&INPIT
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