| 摘要 |
A method for manufacturing a CMOS image sensor may include at least one of the following steps: Forming a salicide blocking layer on an entire surface of a semiconductor substrate having a photodiode area and a transistor. Forming a photoresist pattern inclined at an angle less 90° (e.g. between approximately 70° and approximately 80°) on and/or over a non-salicide area. Performing wet-etching on the salicide blocking layer using the photoresist pattern as an etching mask. Forming salicide on the salicide area after removing the photoresist pattern.
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