| 摘要 |
A micro-mirror array device having a plurality of micro-mirrors which can be deflected comprises a first substrate which includes drive electrodes for deflecting the micro-mirrors; and a second substrate which includes a frame area and connecting areas, wherein the connecting areas are formed around the frame area adjacently, and the plurality of the micro-mirrors which are supported to the frame area by elastic members are formed in the frame area, connecting members which connect to the first substrate, are formed in the connecting areas.
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