CAPACITIVE ACCELERATION SENSOR

摘要

When a relatively low G is applied, weight portions (11b₁, 11b₂) at the large weight portion of a movable electrode (11) oscillate downward with a first beam portion (11d) as a fulcrum, and weight portions (11b₃, 11b₄) at the large weight portion oscillate upward with the first beam portion (11d) as a fulcrum. From a variation in capacitance at that time, measurement acceleration when a relatively low G is applied can be calculated. When a relatively high G is applied, the weight portions (11b₁, 11b₂) at the large weight portion of the movable electrode (11) oscillate downward with the first beam portion (11d) as a fulcrum to abut against a stopper layer (14) on a fixed electrode (12a), and then a small weight portion (11c) oscillates with a second beam portion (11e) as a fulcrum. From a variation in capacitance at that time, measurement acceleration when a relatively high G is applied can be calculated.