| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a beam forming method and a laser beam machining apparatus using the method capable of forming laser beams having a uniform beam profile in a predetermined shape, and realizing the laser beam machining of a workpiece with high precision by using the formed laser beams. <P>SOLUTION: The beam forming method for forming circular laser beams in a predetermined shape comprises: an elliptical shape forming step of forming laser beams of an elliptical shape from laser beams of a circular shape; a branching step of branching the laser beams of the elliptical shape to be obtained by the elliptical shape forming step; a turning step of turning the laser beams of at least one elliptical shape so that the angles of the elliptical shapes to be obtained by the branching step are made different from each other; a combining step of combining laser beams of the elliptical shape to be obtained by the turning step; and a segmenting step of segmenting laser beams of the predetermined shape by passing the composite laser beam obtained by the combining step through a mask mechanism. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
