发明名称 SCANNING PROBE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To measure a value related to the dissipation or a value that is proportional to dissipation energy, without basing on the premise of steady state. SOLUTION: This microscope is equipped with an excitation means 12 for exciting, following a resonance frequency of a cantilever 2; a displacement detector 10 for detecting the displacement of a probe on the tip of the cantilever 2; an amplitude detector 20 for successively acquiring the amplitude from a signal from the displacement detector 10; a difference value detector 21 for acquiring the time difference value of the amplitude; a divider 22 for acquiring a quotient value between each time differential value; a logarithmic converter 23 for acquiring a logarithmic value of the quotient value; and a second divider 24 for acquiring the value, relative to dissipation by acquiring a value determined, by dividing the logarithmic value by a differential time. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008051554(A) 申请公布日期 2008.03.06
申请号 JP20060225729 申请日期 2006.08.22
申请人 SII NANOTECHNOLOGY INC 发明人 OKUBO NORIO
分类号 G01Q10/06;G01Q30/04;G01Q30/06;G01Q60/00;G01Q60/32 主分类号 G01Q10/06
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