| 摘要 |
PROBLEM TO BE SOLVED: To automatically set a region to be observed of interference fringes in a light wave interference measurement device for measuring the shape of an object based on the light and shade of the interference fringes. SOLUTION: A plurality of Images of interference fringes of a base plate and a block gage placed on the base plate are obtained. In two images of a plurality of images, the difference in intensity value between pixels at the same position is obtained. Further, in combination with other two images, the difference in intensity value is obtained similarly. For these differences, sums are obtained for each pixel and images with intensity corresponding to the sum values are created. In the boundary portion 80 between the base plate and block gage, the interference fringes do not occur and therefore the sum decreases. In the portion 82 in which the interference fringes occur, the difference in intensity between images is large and therefore the sum increases. Proper binarizing processing to the image is performed, and the boundary portion 80 between the base plate and the block gauge is extracted. COPYRIGHT: (C)2008,JPO&INPIT
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