APPARATUS FOR TRANSFERRING A SUBSTRATE

摘要

An apparatus for transferring a substrate is provided to prevent damage to rollers and a rotating shaft and generation of impurities by releasing coupling of the rollers. An apparatus(100) for transferring a substrate includes a plurality of rotating shafts(102), a plurality of rollers(104), a driving unit(106), and a plurality of fixing rings. The rotating shafts are arranged in parallel and are rotatably installed. The rollers are coupled with rotating shafts to rotate together with the rotating shafts and support a flat type substrate(10). The driving unit is connected to the rotating shafts and provides rotary power to transfer the flat type substrate. The fixing rings are installed to prevent generation of a slip in circumferential and axial directions of the rotating shafts between the rollers and the rotating shafts. At least one groove is formed to mount at least one fixing ring on an inner peripheral surface of the roller. Triangle grooves having sloped side surfaces corresponding to the grooves are formed on an outer peripheral surface of the rotating shaft.