摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that while it is needed to detect a pattern position and align the pattern with a printing position in order to form an electronic device by a contact print method, the alignment is particularly difficult because, when a self-assembled monolayer (SAMs) is used for a liquid-repellent film, a level difference is the equivalent of one molecule, which is difficult to be optically identified, and there remains a region in which a component precursor is not filled enough even if a self alignment mechanism exists. <P>SOLUTION: An inkjet method is used to drop a silver-dispersed liquid in an alignment mark region 24 that is surrounded by the liquid-repellent film. Since the inside of the alignment mark region 24 is highly lyophilic, the silver-dispersed liquid spreads. In a region outside the alignment mark region, the silver-dispersed liquid is rejected by the liquid-repellent self-assembled monolayer 22, and pulled into a realignment mark region by surface tension, thus making it possible to form an alignment mark structure 31. <P>COPYRIGHT: (C)2008,JPO&INPIT |