发明名称 METHOD OF MANUFACTURING ELECTRONIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To solve the problem that while it is needed to detect a pattern position and align the pattern with a printing position in order to form an electronic device by a contact print method, the alignment is particularly difficult because, when a self-assembled monolayer (SAMs) is used for a liquid-repellent film, a level difference is the equivalent of one molecule, which is difficult to be optically identified, and there remains a region in which a component precursor is not filled enough even if a self alignment mechanism exists. <P>SOLUTION: An inkjet method is used to drop a silver-dispersed liquid in an alignment mark region 24 that is surrounded by the liquid-repellent film. Since the inside of the alignment mark region 24 is highly lyophilic, the silver-dispersed liquid spreads. In a region outside the alignment mark region, the silver-dispersed liquid is rejected by the liquid-repellent self-assembled monolayer 22, and pulled into a realignment mark region by surface tension, thus making it possible to form an alignment mark structure 31. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008053582(A) 申请公布日期 2008.03.06
申请号 JP20060230179 申请日期 2006.08.28
申请人 SEIKO EPSON CORP 发明人 TAKAKUWA ATSUSHI
分类号 H01L21/336;B41M3/00;H01L29/786;H01L41/187;H01L41/22;H01L41/29;H01L41/331;H01L51/05;H01L51/40 主分类号 H01L21/336
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