| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high-purity trialkylgallium and to provide a method for producing a high-purity trialkylgallium by a simple method. SOLUTION: The high-purity trialkylgallium has a silicon atom content of ≤0.1 mass ppm. The high-purity trialkylgallium is produced by forming a gallium-diamine complex from the trialkylgallium and a diamine compound, collecting the complex from the reaction mixture by distillation and dissociating the diamine compound. COPYRIGHT: (C)2008,JPO&INPIT
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