| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape-measuring apparatus and a shape measuring method, using a confocal optical system that allows three-dimensional shape measurement of a cylindrical piece of work, at a high speed. SOLUTION: The shape-measuring apparatus comprises a microlens array 206 for magnifying the measurement range of a cylindrical test object 215; a pinhole array 207 arranged at a position at which the image of reflected light from the cylindrical test object 215 arranged at the in-focus position of an objective lens 218 is formed; a two-dimensional detector 214 for measuring a return light amount passed through each pinhole; a rotating drive mechanism for rotatively driving the cylindrical test object 215 about its axis; and a shape calculation means 217 which selects the pixels of a confocal image, successively obtained by the two-dimensional detector 214 with the rotation of the cylindrical test object 215 and the time, at which a signal for each pixel is obtained and measures the shape of the cylindrical test object 215. COPYRIGHT: (C)2008,JPO&INPIT
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