| 摘要 |
A mount base is adapted to be fixed to a partition wall which is disposed between a stockyard for temporarily storing a wafer carrier which houses a wafer and a wafer processing device for processing the wafer. A wafer transfer window is provided on the mount base. A carrier stage has a table horizontally extended from a lower edge of the wafer transfer window and a carrier plate disposed on the table so as to support the wafer carrier and movable so as to transfer the wafer carrier to the processing device. A buffer stage has a buffer plate horizontally disposed below the table so as to temporarily store the wafer carrier.
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