INSULATING TARGET MATERIAL, METHOD OF MANUFACTURING INSULATING TARGET MATERIAL, INSULATING COMPLEX OXIDE FILM, AND DEVICE

摘要

An insulating target material for obtaining an insulating complex oxide film represented by a general formula AB 1-X C X O 3 , an element A including at least Pb, an element B including at least one of Zr, Ti, V, W, and Hf, and an element C including at least one of Nb and Ta.