POLISHING METHOD OF TAPE SUBSTRATE FOR OXIDE SUPERCONDUCTOR, OXIDE SUPERCONDUCTOR AND SUBSTRATE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a surface polishing method for enhancing crystal orientation of the surface of a tape-like metal substrate to improve critical current of a superconductive thin film.

SOLUTION: An oxide super conductor is composed of the tape-like substrate 110, an intermediate layer formed on the tape-like substrate 110, and an oxide superconductive thin layer formed on the intermediate layer. The method for polishing the surface to be polished of the tape-like substrate is a step for polishing the surface to be polished while continuously traveling the tape-like substrate 110, the polishing process is composed of the steps comprising an initial polishing 103 and a finish polishing 104, and finally the surface roughness Ra of the surface to be polished becomes 2nm or less and an in-plane orientation Δϕ of the intermediate layer becomes 5° or less.

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