发明名称
摘要 Measuring components (7) for aligning an optical beam path with a target are mounted on a rotatable alignment component (5), and can be tilted w.r.t. the alignment component. The optical beam path can be modified by at least one piezoelectric micromotor (1b, 1c). The micromotor is preferably controlled by a computer in the measuring device.
申请公布号 JP2008506965(A) 申请公布日期 2008.03.06
申请号 JP20070521957 申请日期 2005.07.22
申请人 发明人
分类号 G01C1/02;G01C15/00;H02N2/00 主分类号 G01C1/02
代理机构 代理人
主权项
地址