| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate container opener which can be made compact and allows the effective use of a space below a container support. <P>SOLUTION: A movable body 95 capable of moving in the back and forth direction X and a connector 95 fixed to an opener-side door 65 are connected to each other by link members 92 which constitute a parallel link mechanism, in such a manner that a relative angle displacement can be made between the movable body 95 and the connector 93. The angular displacement of each link member 92 with respect to the movable body 95 is regulated at an angular position determined in advance by a means 91 for making an angular displacement of the link members according to the position in the back and forth direction X of the movable body 95. By making the movable body 95 reciprocate in the back and forth direction X by a movable body driving means, the opener-side door 65 is moved in the back and forth direction X and in the up and down direction Z to open and close an opener-side opening 68. The operation needed to open and close the opener-side opening 68 is to move the movable body 95 in the back and forth direction X, and there is no necessity of a structure to drive and guide the movable body 95 in the up and down direction Z, which makes the opener compact and permits the effective use of the space below the FOUP support 31. <P>COPYRIGHT: (C)2008,JPO&INPIT |
