发明名称 CONTINUOUS DOPANT ADDITION
摘要 A continuous dopant coater with improved control of the coating environment and methods and systems relating to the coater. Embodiments of the dopant coater may include a containment chamber and a coating chamber and the use of an inerting media to control the environment within and around the coater.
申请公布号 US2008057686(A1) 申请公布日期 2008.03.06
申请号 US20070846613 申请日期 2007.08.29
申请人 MELGAARD HANS L 发明人 MELGAARD HANS L.
分类号 H01L21/38;C23C16/00 主分类号 H01L21/38
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