发明名称 CONTINUOUS DOPANT ADDITION
摘要 <p>A continuous dopant coater with improved control of the coating environment and methods and systems relating to the coater. Embodiments of the dopant coater may include a containment chamber and a coating chamber and the use of an inerting media to control the environment within and around the coater.</p>
申请公布号 WO2008027956(A2) 申请公布日期 2008.03.06
申请号 WO2007US77098 申请日期 2007.08.29
申请人 DESPATCH INDUSTRIES LIMITED PARTNERSHIP;MELGAARD, HANS, L. 发明人 MELGAARD, HANS, L.
分类号 C23C16/00;H01L21/38 主分类号 C23C16/00
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