发明名称 |
CONTINUOUS DOPANT ADDITION |
摘要 |
<p>A continuous dopant coater with improved control of the coating environment and methods and systems relating to the coater. Embodiments of the dopant coater may include a containment chamber and a coating chamber and the use of an inerting media to control the environment within and around the coater.</p> |
申请公布号 |
WO2008027956(A2) |
申请公布日期 |
2008.03.06 |
申请号 |
WO2007US77098 |
申请日期 |
2007.08.29 |
申请人 |
DESPATCH INDUSTRIES LIMITED PARTNERSHIP;MELGAARD, HANS, L. |
发明人 |
MELGAARD, HANS, L. |
分类号 |
C23C16/00;H01L21/38 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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