Semiconductor disk or wafer scribing method, involves forming average value from measurement values to execute necessary readjustment of scribing force corresponding to stored reference position value

摘要

The method involves temporarily storing a reference position value corresponding to a preset force, and vertically lifting a scribing tool and directly lowering the scribing tool outside of an outer edge of a semiconductor disk to a start value. The scribing tool is introduced with an adjustable approximation speed at the edge of the semiconductor disk. An average value is formed from measurement values to execute necessary readjustment of a scribing force corresponding to the stored reference position value. An independent claim is also included for a device for executing a method for scribing a semiconductor disk or wafer.