| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate inspection system capable of inspecting a plurality of substrates in parallel and having excellent workability. <P>SOLUTION: In the substrate inspection system 10 equipped with a plurality of inspection devices 1, 1', ... for inspecting the substrate P and a visual judging machine (also used as an inspection machine) provided to a plurality of the inspection devices 1, 1', ... in common, the visual judging machine 1 has a display means (4) for collectively displaying the image of the substrate P respectively judged to be bad product by a plurality of the inspection devices 1, 1', ... and an input means (4) for allowing a worker, who visually judges the substrate P on the basis of the image displayed by the display mean (4), to input the judge result. The inspection devices 1, 1', ... read the judge result due to the visual judging machine 1 to perform predetermined operation corresponding to the judge result. <P>COPYRIGHT: (C)2008,JPO&INPIT |
