| 摘要 |
PROBLEM TO BE SOLVED: To reduce contamination of substrates by simplifying a structure, reducing cost, and further dispensing delivery of the substrates between transfer robots, in a substrate treatment device having such a structure that units along two linear lines intersected with each other are disposed. SOLUTION: Cassette-placing sections 11, 12 are formed along a first conveyance path 10. Along a second conveyance path 20 perpendicularly intersecting with the first conveyance path 10, plating processing units 21-24, rear surface cleaning units 25, 26, and periphery cleaning units 27, 28 are provided. A transfer robot TR is provided with a robot body 30, a ball-screw mechanism 50 for making the robot body 30 travel on a rail 58 almost along the second conveyance path 20, and a ball-screw mechanism 40 for swinging the rail 58 by moving an end at the first conveyance path 10 side of the rail 58 along the first conveyance path 10. COPYRIGHT: (C)2008,JPO&INPIT
|
