发明名称 Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus
摘要 A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, includes: an arm having a distal end which is laterally movable in a straight line direction; and end-effectors for loading and unloading substrates in a reaction chamber, which include a lower end-effector and an upper end-effector. One of the lower end-effector or the upper end-effector is movably coupled to the arm at a distal end of the arm, and the other end-effector is fixed to the movably coupled end-effector. The fixed end-effector is fixed to the movably coupled end-effector.
申请公布号 US2008056854(A1) 申请公布日期 2008.03.06
申请号 US20060512637 申请日期 2006.08.30
申请人 ASM JAPAN K.K. 发明人 YAMAGISHI TAKAYUKI;KOBAYASHI TAMIHIRO;WATANABE AKIRA;KANEUCHI KUNIHIRO
分类号 H01L21/677 主分类号 H01L21/677
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