SURFACE TREATMENT METHOD AND APPARATUS

摘要

An object (2) to be treated is adsorbed and fixed by an adsorbing part (11) and is rotated by a rotating part (12). In this state, a treatment liquid supplied from a treatment liquid supplying part (22) is coated on a surface of the object (2) through a treatment liquid coating tube (21). Thermoelectrons emitted from a thermoelectron source (33) are accelerated by an accelerating electrode (34) and are transmitted through a Be film (32) and is applied to the treatment liquid on the surface of the object (2). Upon the application of electron beams to the treatment liquid on the surface of the object (2), the treatment liquid is ionized or radicalized and consequently activated, whereby the surface of the object (2) can be effectively treated.