发明名称 |
FABRICATION OF MICROSTRUCTURES FOR MICRO/NANO-FLUIDIC DEVICES AND MEMS MICRODEVICES USING INORGANIC POLYMERS AND HYDROPHILIC POLYMERS |
摘要 |
A method for manufacturing inorganic micro-fluidic channels is provided to produce polymeric micro-fluidic channels having excellent organic solvent permeability resistance, and reduce production expense and time. A method for manufacturing inorganic micro-fluidic channels includes the steps of: coating a substrate with an inorganic polymer precursor to form a coating layer; placing a micropattern-formed mold on the coating layer to transfer the pattern to the coating layer; removing the mold, and then carrying out light or heat curing; and further performing pyrolysis at 600-1200 ‹C after the curing.
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申请公布号 |
KR20080021103(A) |
申请公布日期 |
2008.03.06 |
申请号 |
KR20080016433 |
申请日期 |
2008.02.22 |
申请人 |
THE INDUSTRY & ACADEMIC COOPERATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC) |
发明人 |
KIM, DONG PYO;HONG, LAN YOUNG;LEE, HONG JOO;YOON, TAE HO |
分类号 |
B82B3/00;B82B1/00 |
主分类号 |
B82B3/00 |
代理机构 |
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