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经营范围
发明名称
Semiconductor substrate Transfer Robot
摘要
申请公布号
KR100810637(B1)
申请公布日期
2008.03.06
申请号
KR20060074903
申请日期
2006.08.08
申请人
发明人
分类号
H01L21/677;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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