| 摘要 |
<p>A container for reticle is provided to reduce an error rate by preventing generation of particles caused by damage of a coating layer due to a contact between the coating layer and a reticle. A housing(20) is formed to store a plurality of reticles(2). A plurality of supporting members(10) are protruded from both sidewalls of the housing to the inside of the housing, to support the reticles. A hard anodizing coating layer(15) is formed on the supporting members in order to face edges of the reticles. The supporting member includes a supporting frame protruded in a horizontal direction on both sidewalls of the housing, a loading part protruded from the supporting frame to a top direction to receive the reticles, and a guide part protruded from the supporting frame to a bottom direction to guide both edges of the reticle.</p> |
