STAMPER FOR FORMING FINE PATTERN AND METHOD FOR MANUFACTURING THEREOF

摘要

A stamper for forming a fine pattern and a method for manufacturing the same are provided to easily modify an ITO(Indium-Tin Oxide) layer to minimize defect rate by manufacturing the stamper through a wet etching of the ITO layer on a transparent layer. An ITO layer(12) being a transparent material and a photoresist(14) are sequentially laminated on a transparent substrate(11). The photoresist is selectively exposed and developed to form a space unit(15) for exposing the ITO layer to the outside. The exposed ITO layer is etched to expose the transparent substrate to the outside. The photoresist remaining on the ITO layer is removed. A wet etching process is performed using an etching liquid whose main component is hydrochloric acid, thereby etching the ITO layer.