发明名称 |
Corrector for the correction of chromatic aberrations in a particle-optical apparatus. |
摘要 |
<p>The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.
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申请公布号 |
EP1783812(A3) |
申请公布日期 |
2008.03.05 |
申请号 |
EP20060123314 |
申请日期 |
2006.11.01 |
申请人 |
FEI COMPANY |
发明人 |
HENSTRA, ALEXANDER;SCHEINFEIN, MICHAEL |
分类号 |
H01J37/153;H01J37/26 |
主分类号 |
H01J37/153 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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