METHOD OF FORMING A CONTACT

摘要

A method for forming a contact is provided to restrain the degradation of a lower pattern due to heat and the generation of a void and a seam inside a metal layer by forming a barrier layer in a contact hole with a sputtering method. A first metal layer(102) including tungsten(W) is formed on a substrate(100). An interlayer(104) is formed on the first metal layer. The interlayer dielectric has a contact hole for partially exposing the metal layer. A barrier layer(108) including tungsten nitride(WN) is formed on a sidewall of the contact hole by sputtering the exposed first metal layer under gas atmosphere containing nitrogen. A second metal layer(110) including tungsten is formed to gap-fill the contact hole on which the barrier layer is formed. The sputtering is performed with a plasma process using inert gas. The inert gas includes argon(Ar), nitrogen(N2), or helium(He). The barrier layer is formed under nitrogen or ammonia gas atmosphere.