发明名称
摘要 A seed crystal assembly for producing monocrystals and a method for producing SiC monocrystals or monocrystalline SiC layers include a seed crystal with a surface having a first partial region intended as a crystallization surface for a monocrystal grown out of a gas phase and a second partial region with a coating that is chemically resistant to the seed crystal and to the gas phase and does not melt at the growth temperatures. As a result, thermal degradation of the seed crystal is avoided and the quality of the monocrystals which are produced is increased.
申请公布号 JP4056562(B2) 申请公布日期 2008.03.05
申请号 JP19970508802 申请日期 1996.06.27
申请人 发明人
分类号 C30B23/00;C30B29/36;C30B23/02;C30B23/04;C30B25/02;C30B25/18 主分类号 C30B23/00
代理机构 代理人
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