发明名称 |
Carbon containing sputter target alloy compositions |
摘要 |
<p>The invention provides a sputter target material. The sputter target material comprises an alloy system comprising homogeneous, densified Cr-Ti-C, wherein Ti comprises at least 0.5 and as much as 20 atomic percent, and C comprises at least 0.5 and as much as 20 atomic percent. A magnetic recording medium comprising a substrate and at least an underlayer comprising the sputter target material of the invention also is provided. A method of manufacturing a sputter target material further provided. The method can employ powder materials comprising a combination of elements can include a chromium alloy, a carbide or carbon containing master alloy.
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申请公布号 |
EP1780300(A3) |
申请公布日期 |
2008.03.05 |
申请号 |
EP20070001965 |
申请日期 |
2005.08.25 |
申请人 |
HERAEUS INC |
发明人 |
ZIANI, ABDELOUAHAB;DARY, FRANCOIS C.;LATHROP, MICHAEL |
分类号 |
C23C14/34;C22C27/06;G11B5/00 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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