发明名称 Carbon containing sputter target alloy compositions
摘要 <p>The invention provides a sputter target material. The sputter target material comprises an alloy system comprising homogeneous, densified Cr-Ti-C, wherein Ti comprises at least 0.5 and as much as 20 atomic percent, and C comprises at least 0.5 and as much as 20 atomic percent. A magnetic recording medium comprising a substrate and at least an underlayer comprising the sputter target material of the invention also is provided. A method of manufacturing a sputter target material further provided. The method can employ powder materials comprising a combination of elements can include a chromium alloy, a carbide or carbon containing master alloy. </p>
申请公布号 EP1780300(A3) 申请公布日期 2008.03.05
申请号 EP20070001965 申请日期 2005.08.25
申请人 HERAEUS INC 发明人 ZIANI, ABDELOUAHAB;DARY, FRANCOIS C.;LATHROP, MICHAEL
分类号 C23C14/34;C22C27/06;G11B5/00 主分类号 C23C14/34
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