DEVICE FOR THE DETECTION OF ELECTROMAGNETIC WAVES AND METHOD FOR PRODUCING SUCH A DEVICE

摘要

Device for the detection of electromagnetic waves with a first plate that contains a membrane and a detector structure fixed at least partially to the membrane, a second plate attached to the first plate, at least one contact point for surface mount technology on the first and/or second plate, whereby in a connection line between the detector structure and the contact point is at least partially led through the first and/or the second plate and that this connection line is at least partially prepared by film deposition and/or plating. ® KIPO & WIPO 2008