| 摘要 |
An air floating apparatus is provided to transfer air to an upper table by forming uniform micro holes in an air floating filter in order to maintain air pressure through all regions where air is supplied, thereby transferring glass substrates in a predetermined gap. An air floating apparatus comprises lower and upper tables(10,40), a gasket(20), and an air floating filter(30). An air supplying hole(11) is formed at the center of the lower table. The gasket is placed above the lower table to prevent air from leaking. The air floating filter is placed above the gasket to pass through air, and is formed with micro holes(31). The upper table formed with multiple through holes(41) is placed above the air floating filter to pass through the air supplied from the air floating filter. The through holes include supplying parts, first and second air passing parts, and a suction part. Thereby, the planarization of the apparatus is controlled. |
