发明名称 Topographically indexed support substrates
摘要 The present invention provides an indexed support substrate. The support substrate comprises at least one set of indexing features that are distinguishable from one another and from the surrounding substrate. The support substrate also comprises a set of useful domains. The indexing features are positioned on the substrate in such a way as to correspond to the useful domains in an identifying fashion.
申请公布号 US7339282(B2) 申请公布日期 2008.03.04
申请号 US20060328783 申请日期 2006.01.10
申请人 BIOFORCE NANOSCIENCES, INC. 发明人 XU JUNTAO;MOSHER CURTIS;LYNCH MICHAEL P.
分类号 G03F9/00;G03F7/20;H01L21/70;H01L21/76;H01L23/544 主分类号 G03F9/00
代理机构 代理人
主权项
地址