EQUIPMENT FOR PREVENTING GAP INCLINER OF SEMICONDUCTOR MANUFACTURING DEVICE

摘要

An apparatus for preventing a gap inclination of semiconductor manufacturing equipment is provided to prevent the release of a nut due to vibration by controlling the tension of a gap chain using a bolt coupled to a gap chain block unit. A housing(30) is fixed on equipment. A bolt(38) controls tension. A bolt fixing unit(34) is bent at a right angle from a side of the housing. A hole(31) is formed on the center of the bolt fixing unit. The bolt passes through the hole of the bolt fixing unit. A gap chain(22) is fixed on a shaft at a lower portion of the gap chain block. A gap chain guide unit(36) is bent at a right angle to an upper portion and a lower portion of the other side of the housing to be formed in a body with the housing. The gap chain guide unit fixes the gap chain block. A nut release preventive unit(46) is inserted into the bolt fixing unit to fix a nut(40) coupled to the bolt so that the nut is not released by vibration.