| 摘要 |
A movable sensor device includes a laminate body in which a micromechanical acting layer having a movable sensor structure and a coating layer coated on the micromechanical acting layer is successively laminated on a substrate. A draft portion penetrates through the laminate body in the lamination direction. The draft portion and a residual portion thereof are disposed at a peripheral portion of the movable sensor structure in the laminate body. The residual portion is a thin portion that is smaller in thickness than the laminate body and has a spring function.
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