| 摘要 |
A thin film heater and a method for manufacturing the same are provided to uniformly radiate heat from the whole surface of the thin film heater and to employ a heating pattern having a uniform thickness by uniformly depositing a heating layer, a seed layer, and a buffer layer. A heating layer(50) is formed an upper layer of a base substrate(10). The heating layer radiates heat by power applied from the outside. A seed layer(40) is disposed between the heating layer and the substrate. The seed layer forms the heating layer at a surface through a plating. A buffer layer(30) is disposed between the seed layer and the base substrate to fix the seed layer on an upper portion of the base substrate. A deposition promoting layer(20) is formed on an upper surface of the base substrate. The deposition promoting layer helps the buffer layer to be deposited. A sensor pattern measures the temperature of the heating layer. The sensor pattern is formed between heating patterns formed on the heating layer.
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