发明名称 A PROVE CONTAINING WAREHOUSE
摘要 A warehouse for a probe containing box is provided to increase containing capacity compared with a rotary-type warehouse by using a driving unit that moves to all direction in the warehouse. A warehouse deposits a plurality of probe containing boxes containing probes in multiple stages having a certain space from each other. A driving unit moves the probe containing boxes in all directions. The driving unit is comprised of a lower probe containing box reciprocating transverse transfer member(15), an upper probe containing box transverse transfer member(16), and an elevating unit. The lower probe containing box reciprocating transverse transfer member transfers a lower-most probe containing box in one direction to a lower position of a lower-most probe containing box in the other direction. The upper probe containing box reciprocating transverse transfer member transfers an upper-most probe containing box in one direction to an upper position of an upper-most probe containing box in the other direction. The warehouse includes probe entrances(17) installed at positions corresponding to left and right probe containing box groups.
申请公布号 KR100809605(B1) 申请公布日期 2008.03.04
申请号 KR20060136923 申请日期 2006.12.28
申请人 KYODO CO., LTD. 发明人 SAITO MORIHIRO;KOIWAI AKIRA
分类号 H01L21/66 主分类号 H01L21/66
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