CHUCKING MEMBER AND SPIN HEAD, METHOD FOR CHUCKING A SUBSTRATE USING THE CHUCKING MEMBER

摘要

A chucking member and a spin head including the chucking member are provided to smoothly discharge an air current generated by revolution of a substrate by using a chucking pin having a streamline shape. A supporting plate(10) is rotatable. Chucking members(100) are installed on an upper surface of the supporting plate and support a lateral side of a substrate to prevent separation of the substrate loaded on the supporting plate due to revolution of the substrate. The chucking member includes a rotatable body(140), a chucking pin(120), and a rotational shaft(160). The chucking pin is eccentrically coupled to an upper of the rotatable body from a rotational center thereof, thereby chucking the lateral side of the substrate. The rotational shaft is coupled to a lower of the rotatable body. The chucking pin is a streamline shape. The chucking pin includes a first front section and a first rear section. The first front section has a first end portion and is positioned on a front with respect to the floe of an air stream generated by the revolution of the substrate. The first rear section is positioned on a rear with respect to the flow of the air stream. An upper surface of the chucking pin is downwardly declined from the first front section to the first rear section.