发明名称 PRE-DISCHARGING APPARATUS
摘要 <p>A pre-discharging apparatus is provided to recycle a cleaning liquid in a cleaning liquid bath by raking out an applying liquid discharged on a priming roller and discharging it to a waste liquid tank through a discharge channel. A cleaning liquid bath(10) contains a cleaning liquid. A priming roller(11) is rotatably arranged in the cleaning liquid bath. The priming roller attaches an applying liquid from a slit nozzle. A first cleaning liquid spray nozzle(12) sprays the cleaning liquid toward the priming roller. Squeezes(13,15) are arranged at a rear end more than the first cleaning liquid spray nozzle to rake out the applying liquid attached on the priming roller. A second cleaning liquid spray nozzle(14) sprays the cleaning liquid toward the priming roller passed through the cleaning liquid in the cleaning liquid bath. An air nozzle(16) sprays dry air toward the priming roller passed through the second cleaning liquid spray nozzle. A discharge channel(17) is installed adjacent to the squeeze. The discharge channel discharges the applying liquid raked out of the priming roller by the squeeze. The applying liquid removed by the squeeze is discharged to a waste liquid tank through the discharge channel.</p>
申请公布号 KR20080019165(A) 申请公布日期 2008.03.03
申请号 KR20070083177 申请日期 2007.08.20
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 YAMAGUCHI KAZUNOBU;TAKASE SHINJI;KAJIMA ATSUO
分类号 H01L21/027;H01L21/02 主分类号 H01L21/027
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