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发明名称
表面发光雷射阵列,光学扫描装置,及成像装置
摘要
一种表面发光雷射阵列系包括复数个表面发光雷射元件。各表面发光雷射元件包括:第一反射层,形成在基板上;共振器,与该第一反射层接触而形成,并含有活性层;以及第二反射层,形成在该第一反射层上方,并与该共振器接触。该二反射层含有选择性氧化层。该第一反射层在该活性层侧上至少含有低折射率层,该低折射率层的氧化率等于或大于该第二反射层中所含有之选择性氧化层的氧化率。该共振器是由至少含有In的AlGaInPAs系材料所制成。台面结构的底部位于该选择性氧化层下方和该第一反射层上方。
申请公布号
TW200812180
申请公布日期
2008.03.01
申请号
TW096131129
申请日期
2007.08.22
申请人
理光股份有限公司
发明人
佐藤俊一;伊藤彰浩;菅原悟;庄子浩义
分类号
H01S5/183(2006.01);B41J2/455(2006.01)
主分类号
H01S5/183(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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