| 摘要 |
<p>Method of producing a thin electromagnetic motor In a micro-motor having a rotor 200, a stator 208 and a shaft 202 projecting from the stator 208 and through a sleeve in the rotor. The shaft 202 has a stepped cross-section and includes a portion 209 which is wider than the narrowest part 212 of the aperture in the rotor and thus limits the distance which the rotor can move from the stator. The MEMS device includes an air- bearing system 206 which creates a uniform hydrodynamic pressure between the rotor and the stator, and thus limits the distance which the rotor can move towards the stator.</p> |
