发明名称 SEMICONDUCTOR CONSTRUCTIONS, MEMORY CELLS, DRAM ARRAYS, ELECTRONIC SYSTEMS, METHODS OF FORMING SEMICONDUCTOR CONSTRUCTIONS, AND METHODS OF FORMING DRAM ARRAYS
摘要 The invention includes a semiconductor construction including rows of contact plugs, and rows of parallel bottom plates. The plug pitch is approximately double the plate pitch. The invention includes a method of forming a semiconductor construction. A plurality of conductive layers is formed over the substrate, the plurality of layers being substantially orthogonal relative to first, second and third rows of contact plugs. An opening is etched which passes through each of the conductive layers within the plurality of conductive layers. The opening is disposed laterally between the first and second row of contact plugs. After etching the opening a dielectric material is deposited over the plurality of conductive layers and a second conductive material is deposited over the dielectric material. The invention includes an electronic system including a processor and a memory operably associated with the processor. The memory device has a memory array which includes double-pitched capacitors.
申请公布号 KR20080019068(A) 申请公布日期 2008.02.29
申请号 KR20087002115 申请日期 2006.06.12
申请人 MICRON TECHNOLOGY, INC. 发明人 JUENGLING WERNER
分类号 H01L21/8242 主分类号 H01L21/8242
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