CLUSTER TOOL AND METHOD FOR PROCESS INTEGRATION IN MANUFACTURING OF A PHOTOMASK,申请号KR20060070780-传众专利搜索

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发明名称	CLUSTER TOOL AND METHOD FOR PROCESS INTEGRATION IN MANUFACTURING OF A PHOTOMASK
摘要
申请公布号	KR100808694(B1)	申请公布日期	2008.02.29
申请号	KR20060070780	申请日期	2006.07.27
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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