发明名称 LDMOS USING A COMBINATION OF ENHANCED DIELECTRIC STRESS LAYER AND DUMMY GATES
摘要 <p>LDMOS Using A Combination Of Enhanced Dielectric Stress layer And Dummy Gates First example embodiments comprise forming a stress layer over a MOS transistor (such as a LDMOS Tx) comprised of a channel and first, second and third junction regions. The stress layer creates a stress in the channel and the second junction region of the Tx. Second example embodiments comprises forming a MOS FET and at least a dummy gate over a substrate. The MOS is comprised of a gate, channel, source, drain and offset drain. At least one dummy gate is over the offset drain. A stress layer is formed over the MOS and the dummy gate. The stress layer and the dummy gate improve the stress in the channel and offset drain region.</p>
申请公布号 SG139620(A1) 申请公布日期 2008.02.29
申请号 SG20070036783 申请日期 2007.05.21
申请人 CHARTERED SEMICONDUCTOR MANUFACTURING LTD. 发明人 CHU SANFORD;YISUO LI;GUOWEI ZHANG;VERMA PURAKH RAJ
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