METHOD OF MANUFACTURING PANEL FOR FLEXIBLE DISPLAY DEVICE

摘要

A method of manufacturing of a flexible display device panel is provided to prevent the substrate from being bent or stretched by depositing a semiconductor layer using low-temperature plasma enhanced chemical vapor deposition. A gate line is formed on a flexible insulation substrate, and then a gate insulating layer(140) is deposited on the gate line. A semiconductor layer is formed on the gate insulating layer, and then a data line(171) having a source electrode(173) and a drain electrode(175) are formed on the semiconductor layer. The step of forming the semiconductor layer is performed by plasma enhanced chemical vapor deposition with RF power of 150W to 300W at about 100 deg.C to about 180 deg.C. The gate insulating layer has a thickness of about 2000 to about 5500.