| 摘要 |
A substrate aligner for maintenance is provided to reduce maintenance time by easily detaching an internal aligner according to the disassembling of an external coupling member. A substrate aligner includes a chamber coupling member(110), a rotation shaft(140), a rotation shaft supporting member(130), an aligner(150), a driving cylinder(170), and a power delivering member(120). The chamber coupling member, which is coupled with an external wall of the chamber, seals a through part formed at a side wall of the chamber. The rotation shaft is vertically positioned in the chamber. The rotation shaft supporting member fixes one end of the rotation shaft into the chamber coupling member. The aligner, which is coupled with the rotation shaft, is rotated. The driving cylinder is installed at an external of the chamber. The power delivering member connects the driving cylinder and aligner.
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