| 摘要 |
<p>A tunable inter-digital capacitor and a method for manufacturing the same are provided to decrease an operation voltage of the inter-digital capacitor and increase tunability of the inter-digital capacitor by inserting an electrode of an inter-digital capacitor into a dielectric and forming a uniform electric field. A first dielectric layer(200) is formed on a substrate(100), and has an electrode pattern groove of an inter-digital capacitor including a ground line and a signal line on the top plane. An electrode metal pattern(300) is formed in the electrode pattern groove of the inter-digital capacitor including the signal line and the ground line formed on the top plane of the first dielectric layer. A second dielectric layer(400) is formed on the top plane of the first dielectric layer to surround the whole electrode metal pattern except a part of the ground line and the signal line.</p> |
