| 摘要 |
<p>The present invention provides an imprinting apparatus ( 1 ) in which an expanded tube ( 43 ) supports a rear surface of an object substance (W) when a pattern of a mold ( 21 ) is imprinted on the object substance. Furthermore, in the present invention, when the tube ( 43 ) is expanded to support the object substance, the object substance is supported by the tube by contact first with a portion corresponding to the center of the surface to be imprinted and then with an outside portion thereof, so that the entire pattern of the mold is tightly pressed onto the imprinting surface of the object substance. Thus, the pattern is evenly imprinted on the object substance at constant pressure.</p> |
